| 1. | Detailed demonstrations and designs for each module ' s scheme are given , including diameter and length contacting module , mass contacting module , dishing depth contacting module , photoelectric microscope non - contacting module , verticality contacting module and data acquisition module . after design , strict accuracy analyses for each measuring module are given 该文对各测量模块的测量方案进行了详细的论证和设计,包括直径高度接触式测量模块、质量接触式测量模块、碟形深度接触式测量模块、倒角肩宽碟宽非接触式测量模块、垂直度接触式测量模块以及数据采集模块的设计。 |